Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds
نویسندگان
چکیده
منابع مشابه
Injection Compression Molding of Replica Molds for Nanoimprint Lithography
As a breakthrough in the cost and durability of molds for nanoimprint lithography (NIL), replica molds are fabricated by injection compression molding (ICM). ICM is commonly used for optical disks such as DVDs or Blu-ray disks and is also a practical fabrication method for nanostructures. In this paper, I successfully demonstrated the fabrication of cycloolefin polymer replica molds with struct...
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In nanoimprint lithography, a surface oxidation process is needed to produce an effective poly(dimethylsiloxane) coating that can be used as an anti-adhesive surface of template molds. However, the conventional photooxidation technique or acidic oxidative treatment cannot be easily applied to polymer molds with nanostructures since surface etching by UV radiation or strong acids significantly d...
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As a candidate for the next generation lithography technology, nanoimprint lithography (NIL) has demonstrated its strong potential to fabricate high resolution (sub-10 nm) patterns with high throughput and low cost. One of its challenges for the acceptance of the industry is related to the mold life time that significantly affects cost of ownership and manufacturing reproducibility. Nowadays, m...
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0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2010.12.107 ⇑ Corresponding author. E-mail address: [email protected] (J We fabricated molds consisting of features in rigid UV-cured resist on an elastic poly(dimethylsiloxane) (PDMS) support for hybrid nanoimprint-soft lithography. The molds were duplicated through coating and curing a UV-curable resist onto a pol...
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ژورنال
عنوان ژورنال: Journal of Nanoscience
سال: 2016
ISSN: 2356-749X,2314-6931
DOI: 10.1155/2016/6571297